Edwards ixl 120 manual. iXL120 Dry Pump

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EDWARDS IXL120 INSTRUCTION MANUAL Pdf Download.

edwards ixl 120 manual

There is no requirement to adjust the oil level. Any hazardous production materials must be diluted to a safe level before entering the pump. Page 51 Edwards and the Edwards logo are trademarks of Edwards Limited. The lifting brackets should be removed and retained. If a warning or alarm condition is indicated:. Each Service Centre offers a wide range of options including disposal. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited.

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iXL120 Dry Pump System

edwards ixl 120 manual

Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited. Page 52 © Edwards Limited 2012. Page 28 © Edwards Limited 2012. Gasket © Edwards Limited 2012. This information relates only to products sold on or after the date of this certificate. Only Edwards trained engineers may install the dry pumping system.

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iXL120 Dry Pump

edwards ixl 120 manual

Edwards Material Safety Data Sheets for fluorinated materials used in the pump are available on request: contact your supplier or Edwards. Contact Edwards for additional information. To avoid a build up of out of date Warnings they are automatically acknowledged after 36 hours. Read this manual before you install and operate your pump. The pump will stop immediately without any gas purges. Note: This warning will only clear when the valve has successfully been opened and closed.

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iXL120 Dry Pump System

edwards ixl 120 manual

Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited. Table 26 - Main power connector Item Item number Main power connector D37491735 © Edwards Limited 2012. Table 5 - Electrical ratings: ultimate vacuum and extracted 700 torr exhaust load condition Electrical sub-system: ultimate vacuum 0. Page 19 Edwards and the Edwards logo are trademarks of Edwards Limited. The water flow rate can be reduced if colder water is supplied. Page 14 © Edwards Limited 2012.

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EDWARDS IXL120 INSTRUCTION MANUAL Pdf Download.

edwards ixl 120 manual

Page 43 Edwards and the Edwards logo are trademarks of Edwards Limited. Page 45 Edwards and the Edwards logo are trademarks of Edwards Limited. All other parameters are set to factory defaults. Use up and down arrows to set target pressure. Page 37 Edwards and the Edwards logo are trademarks of Edwards Limited. Page 34 © Edwards Limited 2012. Page 50 © Edwards Limited 2012.

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Edwards iXL120 E 200

edwards ixl 120 manual

Page 42 © Edwards Limited 2012. Page 8 © Edwards Limited 2012. It is designed to give extremely low cost of ownership. Accessory module Note: Some cables omitted for clarity 4. You must use your pump as specified in this manual otherwise the protection provided by the equipment may be impaired.

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Edwards iXL120 Manuals

edwards ixl 120 manual

Disconnect the inlet and outlet from the vacuum and exhaust systems and fit blanking caps. Then press the Start button Figure 3, item 1. Page 46 © Edwards Limited 2012. Page 49 Edwards and the Edwards logo are trademarks of Edwards Limited. If the pump is replaced, the Auto Tune process must be performed on the replacement pump.

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Edwards iXL120 Manuals

edwards ixl 120 manual

Any requests to start the pump will be rejected until the fault has been rectified. . Page 12 © Edwards Limited 2012. Maximum flow of 5 l min to prevent condensation at 10 °C cooling water. Page 40 © Edwards Limited 2012.

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iXL120 Dry Pump

edwards ixl 120 manual

Edwards and the Edwards logo are trademarks of Edwards Limited. This will ensure that if the cable is accidentally dragged and the strain relief bush on the electrical supply connector mating-half fails, the Earth ground conductor will be the last conductor to be pulled from the connector. Page 44 © Edwards Limited 2012. Page 48 © Edwards Limited 2012. Page 24 © Edwards Limited 2012. When you make the electrical supply cable, ensure that the Earth ground conductor is slightly longer than the phase conductors. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.


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iXL120 Dry Pump System

edwards ixl 120 manual

Gas purge is provided for the sole purpose of enabling the pumping of inert light gases such as helium. Please contact Edwards for advice on setting these values for your application. It provides fast pump down of load lock chambers with extremely low energy consumption. You can conduct the following maintenance on the system when necessary or if you have a problem, contact Edwards. Page 39 Edwards and the Edwards logo are trademarks of Edwards Limited. To ensure correct pump operation, at least 10 seconds must be allowed between successive operations of the input signals.

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